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About this Engineering article
Reduction of Pinhole Leakage Current of SrTiO3 Films by ArF Excimer Laser Deposition with Shadow Mask (“Eclipse Method") by Iwabuchi, Mamoru; Kinoshita, Kazuya; Ishibashi, Hiroshige; Kobayashi, Takeshi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Iwabuchi, Mamoru; Kinoshita, Kazuya; Ishibashi, Hiroshige; Kobayashi, Takeshi
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1994
- Field
- Engineering (Physical Sciences)
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