About this scholarly article

2017 IEEE 12th International Conference on ASIC (ASICON) - Residual stress study of thin films deposited by atomic layer deposition by Zhu, Zhen; Salmi, Emma; Virtanen, Sauli is a scholarly article available to read on EtoBox.

Author

Zhu, Zhen; Salmi, Emma; Virtanen, Sauli

Publisher

IEEE

Published

2017

Language

EN