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About this Engineering article
Microelectron Field Emitter Array with Focus Lenses for Multielectron Beam Lithography Based on Silicon on Insulator Wafer by P. Ngoc Minh; T. Ono; N. Sato; H. Mimura; M. Esashi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- P. Ngoc Minh; T. Ono; N. Sato; H. Mimura; M. Esashi
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 2004
- Field
- Engineering (Physical Sciences)
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