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About this Engineering article
Effects of ozone assisted deposition on the dielectric properties of 90° off-axis radio frequency magnetron sputtered SrTiO3 by Gibbons, B. J.; Fan, Y.; Findikoglu, A. T.; Jia, Q. X.; Reagor, D. W. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Gibbons, B. J.; Fan, Y.; Findikoglu, A. T.; Jia, Q. X.; Reagor, D. W.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2001
- Field
- Engineering (Physical Sciences)