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About this Engineering article
Characterization of high-quality relaxed flat InGaN template fabricated by combination of epitaxial lateral overgrowth and chemical mechanical polishing by Okada, Narihito; Inomata, Yuki; Ikeuchi, Hiroki; Fujimoto, Satoru; Itakura, Hideyuki; Nakashima, Shintaro; Kawamura, Rei; Tadatomo, Kazuyuki is a Engineering article available to read on EtoBox.
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- Author
- Okada, Narihito; Inomata, Yuki; Ikeuchi, Hiroki; Fujimoto, Satoru; Itakura, Hideyuki; Nakashima, Shintaro; Kawamura, Rei; Tadatomo, Kazuyuki
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-0248)
- Published
- 2019
- Field
- Engineering (Physical Sciences)