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About this Engineering article
Real-Time Analyses of Strain in Ultrathin Silicon Nanolayers on Insulators during Thermal Oxidation by Omi, Hiroo; Kawamura, Tomoaki; Kobayashi, Yoshihiro; Fujikawa, Seiji; Tsusaka, Yoshiyuki; Kagoshima, Yasushi; Matsui, Junji is a Engineering article available to read on EtoBox.
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- Author
- Omi, Hiroo; Kawamura, Tomoaki; Kobayashi, Yoshihiro; Fujikawa, Seiji; Tsusaka, Yoshiyuki; Kagoshima, Yasushi; Matsui, Junji
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; Japan Soc of Applied Physics; IOP Publishing (ISSN 1882-0778)
- Published
- 2009
- Language
- EN
- Field
- Engineering (Physical Sciences)