About this scholarly article

SPIE Proceedings [SPIE SPIE Optifab - Rochester, New York, United States (Monday 12 October 2015)] Optifab 2015 - Systematic error analysis for 3D nanoprofiler tracing normal vector by Bentley, Julie L.; Stoebenau, Sebastian; Kudo, Ryota; Tokuta, Yusuke; Nakano, Motohiro; Yamamura, Kazuya; Endo, Katsuyoshi is a scholarly article available to read on EtoBox.

Author

Bentley, Julie L.; Stoebenau, Sebastian; Kudo, Ryota; Tokuta, Yusuke; Nakano, Motohiro; Yamamura, Kazuya; Endo, Katsuyoshi

Publisher

SPIE

Published

2015

Language

EN