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About this Engineering article
Cross-sectional Transmission Electron Microscopy Study of the Structure of Titanium Diffusion Barriers on (100) Silicon by J.T. McGinn; J.-S. Maa; C.J. Buiocchi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J.T. McGinn; J.-S. Maa; C.J. Buiocchi
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0921-5093)
- Published
- 1989
- Language
- EN
- Field
- Engineering (Physical Sciences)