About this scholarly article

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Rapid Isothermal Processing - Characteristics of Reactively Evaporated and Rapid-Thermally Oxidized Yttrium Films on Silicon by Kalkur, T. S.; Kwor, R. Y.; Singh, Rajendra is a scholarly article available to read on EtoBox.

Author

Kalkur, T. S.; Kwor, R. Y.; Singh, Rajendra

Publisher

SPIE

Published

1990