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About this Engineering article
Gate quality Si3N4/Si/n-In0.53Ga0.47As metal-insulator-semiconductor capacitors by Wang, Z. ;Mui, D. S. L. ;Demirel, A. L. ;Biswas, D. ;Reed, J. ;Morkoç, H. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Wang, Z. ;Mui, D. S. L. ;Demirel, A. L. ;Biswas, D. ;Reed, J. ;Morkoç, H.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1992
- Language
- EN
- Field
- Engineering (Physical Sciences)
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