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What is Integrated Circuit Process Improvement Analysis about?

This document summarizes the results of a process improvement study for an integrated circuit manufacturing process. Only eight runs could be made in the study. The design was set up and the alias structure found. Using observations from another problem, the factor effects were estimated. The ANOVA results showed that the main factors A, B, C, and D had large effects. However, it was noted that the study actually estimated combined effects due to aliasing. So the interpretations of the experiment need to ac

Author

Prof Bilal Hassan

Language

EN