About this Engineering article
Slip-Free Rapid Thermal Processing in Single Wafer Furnace by W. S. Yoo; T. Fukada; H. Kitayama; N. Takahashi; K. Enjoji; K. Sunohara is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- W. S. Yoo; T. Fukada; H. Kitayama; N. Takahashi; K. Enjoji; K. Sunohara
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2000
- Language
- EN
- Field
- Engineering (Physical Sciences)