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About this Physics and Astronomy article

Optimization of discharge antenna turn and modulation of EEPFs and plasma parameters in dual-frequency cylindrical ICP source at different gas pressures by Hua, Yue; Hao, Zeyu; Ren, Chunsheng; Song, Jian is a Physics and Astronomy article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Physics and Astronomy.

Author
Hua, Yue; Hao, Zeyu; Ren, Chunsheng; Song, Jian
Publisher
American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
Published
2020
Field
Physics and Astronomy (Physical Sciences)

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