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About this Engineering article
Influence of Dry and Wet Cleaning on the Properties of Rapid Thermal Grown and Deposited Gate Dielectrics by Xiaoli Xu; Richard T. Kuehn; Mehmet C. Öztürk; Jimmie J. Wortman; Robert J. Nemanich; Gari S. Harris; Dennis M. Maher is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Xiaoli Xu; Richard T. Kuehn; Mehmet C. Öztürk; Jimmie J. Wortman; Robert J. Nemanich; Gari S. Harris; Dennis M. Maher
- Publisher
- Springer US; Springer-Verlag; Springer New York LLC; Springer Science and Business Media LLC (ISSN 0361-5235)
- Published
- 1993
- Language
- EN
- Field
- Engineering (Physical Sciences)