About this scholarly article

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale - Error factors affecting the result of Laser Interference Lithography by Zhang, Jin; Jiang, Shilei; Tan, Chunlei; Wang, Zuobin; Li, Dayou; Yue, Yong; Qiu, Renxi; Sun, Guobin; Yang, Lihong; Wang, Sanlong is a scholarly article available to read on EtoBox.

Author

Zhang, Jin; Jiang, Shilei; Tan, Chunlei; Wang, Zuobin; Li, Dayou; Yue, Yong; Qiu, Renxi; Sun, Guobin; Yang, Lihong; Wang, Sanlong

Publisher

IEEE

Published

2013

Language

EN