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About this Engineering article
Novel Materials for the Semiconductor Industry, Deposited Using a Rapid Thermal Chemical Vapour Deposition System by J.H. Montgomery; F.H. Ruddell; D.W. McNeill; B.M. Armstrong; H.S. Gamble is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J.H. Montgomery; F.H. Ruddell; D.W. McNeill; B.M. Armstrong; H.S. Gamble
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-0136)
- Published
- 1992
- Language
- EN
- Field
- Engineering (Physical Sciences)
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