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About this Materials Science article
Improved Pattern Transfer in Nanoimprint Lithography at 30 nm Half-Pitch by Substrate−Surface Functionalization by Jung, Gun-Young; Li, Zhiyong; Wu, Wei; Ganapathiappan, S.; Li, Xuema; Olynick, Deirdre L.; Wang, S. Y.; Tong, William M.; Williams, R. Stanley is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Jung, Gun-Young; Li, Zhiyong; Wu, Wei; Ganapathiappan, S.; Li, Xuema; Olynick, Deirdre L.; Wang, S. Y.; Tong, William M.; Williams, R. Stanley
- Publisher
- American Chemical Society; American Chemical Society (ACS) (ISSN 0743-7463)
- Published
- 2005
- Language
- EN
- Field
- Materials Science (Physical Sciences)