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About this Engineering article
Effect of Vacuum Break After the Barrier Layer Deposition on the Electromigration Performance of Aluminum Based Line Interconnects by Cher Ming Tan; Arijit Roy; Kok Tong Tan; Derek Sim Kwang Ye; Frankie Low is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Cher Ming Tan; Arijit Roy; Kok Tong Tan; Derek Sim Kwang Ye; Frankie Low
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 2005
- Language
- EN
- Field
- Engineering (Physical Sciences)
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