About this scholarly article

Reliability study of AlTi/TiW on polysilicon contacts for high temperature sensors by A. Andrei; C. Malhaire; S. Brida; J. M. Dujardin; D. Barbier; O. Legras is a scholarly article available to read on EtoBox.

Author

A. Andrei; C. Malhaire; S. Brida; J. M. Dujardin; D. Barbier; O. Legras

Publisher

Springer-Verlag; Springer Verlag; Springer Science and Business Media LLC (ISSN 0946-7076)

Published

2005

Language

EN