About this scholarly article

2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE) - Numerical investigations of the strain behavior in nanoscale patterned strained silicon structures by Naumann, F.; Moutanabbir, O.; Reiche, M.; Schriever, C.; Schilling, J.; Petzold, M. is a scholarly article available to read on EtoBox.

Author

Naumann, F.; Moutanabbir, O.; Reiche, M.; Schriever, C.; Schilling, J.; Petzold, M.

Publisher

IEEE

Published

2010