About this scholarly article

Annularly Grooved Diaphragm Pressure Sensor With Embedded Silicon Nanowires for Low Pressure Application by Zhang, Songsong; Wang, Tao; Lou, Liang; Tsang, Wei Mong; Sawada, Renshi; Kwong, Dim-Lee; Lee, Chengkuo is a scholarly article available to read on EtoBox.

Author

Zhang, Songsong; Wang, Tao; Lou, Liang; Tsang, Wei Mong; Sawada, Renshi; Kwong, Dim-Lee; Lee, Chengkuo

Publisher

IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 1057-7157)

Published

2014