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About this Engineering article
The formation of buried oxide layers by ion implantation : T. A. Woods, E. Antonelli, R. A. Collins, D. J. Chivers and G. Dearnaley. Vacuum36(11/12), 883 (1986) is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 1987
- Language
- EN
- Field
- Engineering (Physical Sciences)