About this scholarly article

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Fabrication and Characterization of Nanostructured Ta-Si-N Films by Chung, C.K.; Chen, T.S.; Peng, C.C.; Wu, B.H is a scholarly article available to read on EtoBox.

Author

Chung, C.K.; Chen, T.S.; Peng, C.C.; Wu, B.H

Publisher

IEEE

Published

2007

Language

EN