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Lithographic Apparatus and Motor Design by hl5612867 is a document available to read on EtoBox.
What is Lithographic Apparatus and Motor Design about?
The document is a patent application for a lithographic apparatus and motor designed for high precision in substrate positioning. It describes a Lorentz actuator that utilizes a main and subsidiary magnet system to produce forces between parts of the apparatus, minimizing heat generation and improving efficiency. The invention aims to enhance the performance of lithographic projection systems used in manufacturing integrated circuits by reducing the mass of back iron in the actuator without compromising its
- Author
- hl5612867
- Language
- EN