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About this Engineering article
Monte Carlo Simulation of the Growth Rate of Films in a CVD Diffusion Reactor. by NANBU, Kenichi; SUGAWARA, Taku; IGARASHI, Saburo is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- NANBU, Kenichi; SUGAWARA, Taku; IGARASHI, Saburo
- Publisher
- The Japan Society of Mechanical Engineers; Japan Society of Mechanical Engineers/Nihon Kikai Gakkai; Japan Society of Mechanical Engineers (ISSN 0387-5016)
- Published
- 1991
- Field
- Engineering (Physical Sciences)
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