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About this Materials Science article
Excimer Laser Reactive Ablation Deposition of Silicon Nitride Films by E. D'Anna; G. Leggieri; A. Luches; M. Martino; A. Perrone; G. Majni; P. Mengucci; R. Alexandrescu; I.N. Mihailescu; J. Zemek is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- E. D'Anna; G. Leggieri; A. Luches; M. Martino; A. Perrone; G. Majni; P. Mengucci; R. Alexandrescu; I.N. Mihailescu; J. Zemek
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)
- Published
- 1995
- Language
- EN
- Field
- Materials Science (Physical Sciences)