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About this Engineering article
Sub 100 Nm Proton Beam Micromachining: Theoretical Calculations on Resolution Limits by J.A van Kan; T.C Sum; T Osipowicz; F Watt is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J.A van Kan; T.C Sum; T Osipowicz; F Watt
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 2000
- Field
- Engineering (Physical Sciences)
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