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About this Engineering article
Morphology Control of Films Formed by Atmospheric-Pressure Chemical Vapor Deposition Using Tetraethylorthosilicate/Ozone System by Adachi, Motoaki; Okuyama, Kikuo; Fujimoto, Toshiyuki; Sato, Jun-ichi; Muroyama, Masakazu is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Adachi, Motoaki; Okuyama, Kikuo; Fujimoto, Toshiyuki; Sato, Jun-ichi; Muroyama, Masakazu
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1996
- Language
- EN
- Field
- Engineering (Physical Sciences)