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Structural Analysis of Ionic Photobase Generators and Lithographic Patterning of Polysilane Films Containing the Photobase Generators by Noda, Kunihiro; Kikuchi, Shun; Ikuma, Naohiko; Shiota, Dai; Furutani, Masahiro; Arimitsu, Koji is a Engineering article available to read on EtoBox.

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Author
Noda, Kunihiro; Kikuchi, Shun; Ikuma, Naohiko; Shiota, Dai; Furutani, Masahiro; Arimitsu, Koji
Publisher
Japan Science and Technology Information Aggregator, Electronic; The Technical Association of Photopolymers, Japan; Technical Association of Photopolymers; Technical Association of Photopolymers, Japan (ISSN 0914-9244)
Published
2019
Field
Engineering (Physical Sciences)

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