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Excimer laser-induced etching of non-hydrogenated (a-C) and hydrogenated (a-C:H) diamond-like carbon films: a comparative study by A.P. Malshe; S.B. Ogale; S.T. Kshirsagar; K.S. Chari is a Materials Science article available to read on EtoBox.

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Author
A.P. Malshe; S.B. Ogale; S.T. Kshirsagar; K.S. Chari
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-577X)
Published
1991
Language
EN
Field
Materials Science (Physical Sciences)

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