About this scholarly article

International Workshops and Tutorials on Electron Devices and Materials - Multivariate Modeling of Heterogeneous Geometrical Surfaces in the Technological Cycle of Manufacturing Silicon Matrixes by Perov, Gennadiy; Shauerman, Aleksey is a scholarly article available to read on EtoBox.

Author

Perov, Gennadiy; Shauerman, Aleksey

Publisher

IEEE

Published

2006

Language

EN