Opening book details…
About this Engineering article
Spectral characterization of an industrial EUV light source for nanolithography by Torretti, Francesco; Liu, Fei; Bayraktar, Muharrem; Scheers, Joris; Bouza, Zoi; Ubachs, Wim; Hoekstra, Ronnie; Versolato, Oscar is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Torretti, Francesco; Liu, Fei; Bayraktar, Muharrem; Scheers, Joris; Bouza, Zoi; Ubachs, Wim; Hoekstra, Ronnie; Versolato, Oscar
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0022-3727)
- Published
- 2019
- Language
- EN
- Field
- Engineering (Physical Sciences)