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About this Engineering article
Effects of Susceptor Rotation Speed and Total Flow Rate on Selectivity in Metalorganic Chemical Vapor Deposition Growth Techniques by Takashi Kobayashi; Minoru Ida; Kenji Kurishima is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Takashi Kobayashi; Minoru Ida; Kenji Kurishima
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-0248)
- Published
- 1994
- Field
- Engineering (Physical Sciences)
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