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About this Engineering article
Sub-10 nm Nanoimprint Lithography by Wafer Bowing by Wu, Wei; Tong, William M.; Bartman, Jonathan; Chen, Yufeng; Walmsley, Robert; Yu, Zhaoning; Xia, Qiangfei; Park, Inkyu; Picciotto, Carl; Gao, Jun; Wang, Shih-Yuan; Morecroft, Deborah; Yang, Joel; Berggren, Karl K.; Williams, R. Stanley is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Wu, Wei; Tong, William M.; Bartman, Jonathan; Chen, Yufeng; Walmsley, Robert; Yu, Zhaoning; Xia, Qiangfei; Park, Inkyu; Picciotto, Carl; Gao, Jun; Wang, Shih-Yuan; Morecroft, Deborah; Yang, Joel; Berggren, Karl K.; Williams, R. Stanley
- Publisher
- American Chemical Society; American Chemical Society (ACS) (ISSN 1530-6984)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)