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About this Engineering article
Low-temperature silicon oxidation using oxidizing radicals produced by catalytic decomposition of H 2 O/H 2 on heated tungsten wire by Katamune, Yūki; Negi, Takanobu; Tahara, Shinichi; Fukushima, Kazuya; Izumi, Akira is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Katamune, Yūki; Negi, Takanobu; Tahara, Shinichi; Fukushima, Kazuya; Izumi, Akira
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2018
- Language
- EN
- Field
- Engineering (Physical Sciences)