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Can I read TEM study of crystalline structures of Cr–N thin films on EtoBox?
TEM study of crystalline structures of Cr–N thin films by X. Z. Li; J. Zhang; D. J. Sellmyer is a Materials Science article available to read on EtoBox.
What is TEM study of crystalline structures of Cr–N thin films about?
Cr–N films were grown on Si (001) substrates by reactive magnetron sputtering under an N~2~/Ar atmosphere at room temperature. The composition of the films, expressed as Cr~1−__x__~N~__x__~, can be varied by changing the N~2~/Ar pressure ratio during the synthesis process. Crystalline states of Cr–N films have been studied using electron diffraction. It is well known that two intermediate phases, Cr~2~N (hexagonal) and CrN (cubic), exist in the Cr–N system, and small variations around the ideal stoichiometry are tolerated. The present study shows that cubic CrN with vacancies rather than hexagonal Cr~2~N may exist in a Cr–N film with a thickness of about 50 nm produced under a low N~2~partial pressure.
Who reads TEM study of crystalline structures of Cr–N thin films?
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- X. Z. Li; J. Zhang; D. J. Sellmyer
- Publisher
- International Union of Crystallography; Blackwell Publishing Inc.; International Union of Crystallography (IUCr) (ISSN 0021-8898)
- Published
- 2004
- Language
- EN
- Field
- Materials Science (Physical Sciences)