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About this Engineering article
The Effect of Polysilicon Deposition and Doping Processes on Double-Poly Capacitors - Electrical and AFM Evaluation by Paulson, W. M.; Breaux, L. H.; Hegde, R. I.; Tobin, P. J. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Paulson, W. M.; Breaux, L. H.; Hegde, R. I.; Tobin, P. J.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1993
- Language
- EN
- Field
- Engineering (Physical Sciences)
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