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Pattern Scaling of Holes, Bars, and Trenches with Directed Self-Assembly using Polymer Blend by Matsui, Yoshinori; Lin, Chi-Chun; Abdallah, Jassem A.; Tseng, Chiahsun; Xu, Yongan; Colburn, Matthew is a Engineering article available to read on EtoBox.

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Author
Matsui, Yoshinori; Lin, Chi-Chun; Abdallah, Jassem A.; Tseng, Chiahsun; Xu, Yongan; Colburn, Matthew
Publisher
Japan Science and Technology Information Aggregator, Electronic; The Technical Association of Photopolymers, Japan; Technical Association of Photopolymers; Technical Association of Photopolymers, Japan (ISSN 0914-9244)
Published
2013
Language
EN
Field
Engineering (Physical Sciences)

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