About this scholarly article

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Design for Manufacturability through Design-Process Integration IV - Library-based performance-based OPC by Teh, Siew-Hong; Rieger, Michael L.; Thiele, Joerg; Heng, Chun-Huat; Tay, Arthur is a scholarly article available to read on EtoBox.

Author

Teh, Siew-Hong; Rieger, Michael L.; Thiele, Joerg; Heng, Chun-Huat; Tay, Arthur

Publisher

SPIE

Published

2010

Language

EN