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Tunable Phase Shifter Based on Inkjet-Printed Ferroelectric MIM Varactors by Mohammad Nikfalazar; Alex Wiens; Morten Mikolajek; Andreas Friederich; Christian Kohler; Mojtaba Sohrabi; Yuliang Zheng; Daniel Kienemund; Sergiy Melnyk; Joachim R. Binder; Rolf Jakoby is a Engineering article available to read on EtoBox.

What is Tunable Phase Shifter Based on Inkjet-Printed Ferroelectric MIM Varactors about?

## Abstract This paper presents a new method for the fabrication of tunable multilayer ferroelectric components based on inkjet printing. Inkjet printing is a low-cost technology for selective film fabrication and has high potential for the preparation of tunable dielectric layers for radio frequency and microwave applications. With this technology, tunable metal-insulator-metal (MIM) capacitor is fabricated, that is composed of inkjet-printed Barium-Strontium-Titanate striplines and photo-lithographically structured gold electrodes. Compared to coplanar capacitors, such MIM varactors require significantly lower DC-voltage for tuning. By applying 20 V across a 1 μm-thick BST film, a tunability of 33% is achieved at 8 GHz and tunability of 60% by applying 50 V. To demonstrate the field of application of this MIM varactor, a tunable phase shifter is designed and fabricated at 8 GHz. A phase shift of 143° and a figure of merit (FoM) of 28°/dB are achieved by applying maximum 50 V tuning voltage.

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Author
Mohammad Nikfalazar; Alex Wiens; Morten Mikolajek; Andreas Friederich; Christian Kohler; Mojtaba Sohrabi; Yuliang Zheng; Daniel Kienemund; Sergiy Melnyk; Joachim R. Binder; Rolf Jakoby
Publisher
Walter de Gruyter GmbH
Published
2014
Language
EN
Field
Engineering (Physical Sciences)

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