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This paper presents the design, simulation, fabrication, and testing of ZnO-based contour-mode micro-resonators that integrate piezoelectric zinc oxide layers. The study explores various configurations of inter-digitated electrodes to optimize the quality factor and electromechanical coupling coefficient, achieving a maximum quality factor of 1600 at resonant frequencies around 700 MHz. Results indicate that reducing the number and length of IDT fingers, as well as the thickness of the ZnO layer, significan

Author

digtiger

Language

EN