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ECS Transactions - Spectroscopic Studies of Band Edge Electronic and Defect States in Elemental High-k Oxide Dielectrics and Si Oxynitride Alloys onto Si(100) Substrates by Lucovsky, Gerald; Seo, Hyungtak; Fleming, Les; Ulrich, Marc; Lüning, Jan is a scholarly article available to read on EtoBox.

Author
Lucovsky, Gerald; Seo, Hyungtak; Fleming, Les; Ulrich, Marc; Lüning, Jan
Publisher
ECS
Published
2007

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