About this Engineering article
Fluid Modeling for Plasma-enhanced Direct Current Chemical Vapor Deposition by Ismagilov, Rinat R.; Khamidullin, Ildar R.; Kleshch, Victor I.; Malykhin, Sergei A.; Alexeev, Andrey M.; Obraztsov, Alexander N. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ismagilov, Rinat R.; Khamidullin, Ildar R.; Kleshch, Victor I.; Malykhin, Sergei A.; Alexeev, Andrey M.; Obraztsov, Alexander N.
- Publisher
- The International Society for Optical Engineering; SPIE - International Society for Optical Engineering; Society of Photo-Optical Instrumentation Engineers; SPIE-Intl Soc Optical Eng (ISSN 1934-2608)
- Published
- 2015
- Field
- Engineering (Physical Sciences)