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About this Engineering article
Formation of Thin Carbide Films of Titanium and Tantalum by Methane Plasma Immersion Ion Implantation by K. Baba; R. Hatada; S. Flege; G. Kraft; W. Ensinger is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- K. Baba; R. Hatada; S. Flege; G. Kraft; W. Ensinger
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 2007
- Language
- EN
- Field
- Engineering (Physical Sciences)
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