About this Engineering article
Formation of Three-dimensional Structures in the Silicon Carbide Substrates by Plasma-chemical Etching by L. A. Seidman is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- L. A. Seidman
- Publisher
- Springer; Pleiades Publishing; Springer Science and Business Media LLC; Pleiades Publishing Ltd (ISSN 1063-7397)
- Published
- 2016
- Field
- Engineering (Physical Sciences)