About this document
Savannah S-100 ALD User Manual by l1903439616 is a document available to read on EtoBox.
The document is a user manual for the Savannah S-100 Atomic Layer Deposition (ALD) system at the University of Notre Dame, detailing training procedures, system cleanliness requirements, and operational instructions. It includes contact information for personnel, standby conditions, and a step-by-step guide for running a deposition. Users must ensure proper sample conditions and follow specific procedures to maintain system integrity and cleanliness.
- Author
- l1903439616
- Language
- EN