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About this Engineering article
High Energy Si, Zn and Ga Ion Implantation into GaAs on Si by Tamura, M.; Saitoh, T. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Tamura, M.; Saitoh, T.
- Publisher
- Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9752)
- Published
- 1995
- Field
- Engineering (Physical Sciences)