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About this Engineering article
Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection by Pinto, Rui M. R.; Brito, Pedro; Chu, Virginia; Conde, Joao Pedro is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Pinto, Rui M. R.; Brito, Pedro; Chu, Virginia; Conde, Joao Pedro
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 1057-7157)
- Published
- 2019
- Language
- EN
- Field
- Engineering (Physical Sciences)
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