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About this Engineering article
Selective Electrodeposition Technology for Organic Insulator Films on Microelectromechanical-System Structures by Sakata, Tomomi; Ishii, Hiromu; Okabe, Yuichi; Sato, Norio; Nagase, Masao; Kamei, Toshikazu; Kudou, Kazuhisa; Yano, Masaki; Machida, Katsuyuki is a Engineering article available to read on EtoBox.
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- Author
- Sakata, Tomomi; Ishii, Hiromu; Okabe, Yuichi; Sato, Norio; Nagase, Masao; Kamei, Toshikazu; Kudou, Kazuhisa; Yano, Masaki; Machida, Katsuyuki
- Publisher
- Japan Science and Technology Information Aggregator, Electronic; Institute Electrical Engineers Japan; The Institute of Electrical Engineers of Japan; Institute of Electrical Engineers of Japan (IEE Japan); Test accounts (ISSN 1341-8939)
- Published
- 2006
- Field
- Engineering (Physical Sciences)