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About this Physics and Astronomy article
Nanometer-scale Mechanical Imaging of Aluminum Damascene Interconnect Structures in a Low-dielectric-constant Polymer by Geer, R. E.; Kolosov, O. V.; Briggs, G. A. D.; Shekhawat, G. S. is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Geer, R. E.; Kolosov, O. V.; Briggs, G. A. D.; Shekhawat, G. S.
- Publisher
- American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
- Published
- 2002
- Field
- Physics and Astronomy (Physical Sciences)
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